During the High Efficiency Penetration Air-Filter running, if any leakage or allowed because of not fully installed happened, the intended cleaning effect will not be achieved, so, it’s necessary to detect leaks in high efficiency filtration systems (HEPA & ULPA). To validate the integrity of a filtration system, a known challenge agent (such as Aerosol Generator) consisting of an airborne test aerosol is generated and introduced upstream of the filter. The challenge agent provides particulate matter upstream of the filter to allow measurements downstream of the filter. To take the Photometer for checking the upstream aerosol concentration and comparing with the downstream aerosol with the use of the scanning probe, the leakage of HEPA will be detected for the efficiency.